✦ LIBER ✦

Possible applications of tantalum silicide for very-large-scale integration technology

✍ Scribed by K. Hieber; F. Neppl

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma etching of silicides and polycide

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✍ R. Pantel; F. Arnaud d'Avitaya; P. Staib 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 232 KB

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✍ R.S. Nowicki; M.-A. Nicolet 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 656 KB

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✍ Mavor, J. 📂 Article 📅 1981 🏛 The Institution of Electrical Engineers ⚖ 163 KB

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✍ Prucnal, Paul R.; Fossum, Eric R.; Osgood, Richard M. 📂 Article 📅 1986 🏛 Optical Society of America 🌐 English ⚖ 422 KB