General aspects of barrier layers for very-large-scale integration applications II: Practice

✍ Scribed by R.S. Nowicki; M.-A. Nicolet

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 656 KB
• Volume: 96
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(82)90515-6