Electron microscopy observations of N2+ -implanted TiN films as diffusion barriers for very-large-scale integration applications

✍ Scribed by A. Armigliato; M. Finetti; S. Guerri; P. Ostoja; A. Scorzoni; J. Garrido

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 397 KB
• Volume: 140
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(86)90172-0