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Positron annihilation study of defects and Si nanoprecipitation in sputter-deposited silicon oxide films

✍ Scribed by R.S. Yu; K. Ito; K. Hirata; K. Sato; W. Zheng; Y. Kobayashi

Book ID: 108107747
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 212 KB
Volume: 379
Category: Article
ISSN: 0009-2614
DOI: 10.1016/j.cplett.2003.08.056

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