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A Study of Defects in Heat Treated Cz-Silicon by Positron Annihilation

✍ Scribed by Arutyunov, N. Yu. ;Emtsev, V. V. ;Schmalz, K. ;Trashchakov, V. Yu.


Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
254 KB
Volume
121
Category
Article
ISSN
0031-8965

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Positron Annihilation Spectroscopy (PAS) performed with continuous and pulsed positron beams allows to characterize the size of the intrinsic nano-voids in silica glass, their in depth modification after ion implantation and their decoration by implanted ions. Three complementary PAS techniques, lif