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Positron annihilation spectroscopy of the defect structure of sputter-deposited TiN

✍ Scribed by J.P. Schaffer; A.B. Dewald Jr.; R.L. Frost; A.J. Perry; B. Nielsen; K.G. Lynn

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
753 KB
Volume
36
Category
Article
ISSN
0257-8972

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