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Porous silicon as a sacrificial material

✍ Scribed by Bell, T E; Gennissen, P T J; DeMunter, D; Kuhl, M

Book ID: 120196520
Publisher: Institute of Physics
Year: 1996
Tongue: English
Weight: 787 KB
Volume: 6
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/6/4/002

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