Phosphorus diffusion gettering process of multicrystalline silicon using a sacrificial porous silicon layer

✍ Scribed by Derbali Lotfi, Ezzaouia Hatem

• Book ID: 119906048
• Publisher: Springer-Verlag
• Year: 2012
• Tongue: English
• Weight: 298 KB
• Volume: 7
• Category: Article
• ISSN: 1931-7573
• DOI: 10.1186/1556-276x-7-424