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Use of porous silicon antireflection coating in multicrystalline silicon solar cell processing

โœ Scribed by Bilyalov, R.R.; Stalmans, L.; Schirone, L.; Levy-Clement, C.


Book ID
114537899
Publisher
IEEE
Year
1999
Tongue
English
Weight
140 KB
Volume
46
Category
Article
ISSN
0018-9383

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Silicon nitride (SiN) ยฎlms fabricated by remote plasma-enhanced chemical vapour deposition (RPECVD) have recently been shown to provide an excellent electronic passivation of silicon surfaces. This property, in combination with its large refractive index, makes RPECVD SiN an ideal candidate for a su