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Effect of extended phosphorus diffusion gettering on chromium impurity in HEM multicrystalline silicon

โœ Scribed by Nabil Khelifati; Djoudi Bouhafs; Messaoud Boumaour; Seddik-El-Hak Abaidia; Baya Palahouane

Book ID
113810398
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
323 KB
Volume
15
Category
Article
ISSN
1369-8001

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Effect of crucible cover material on imp
Effect of crucible cover material on impurities of multicrystalline silicon in a unidirectional solidification furnace
โœ B. Gao; S. Nakano; K. Kakimoto ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 618 KB

It has been suggested that the use of a crucible cover can reduce the carbon impurity of multicrystalline silicon in a unidirectional solidification furnace. The material of the cover has an obvious effect on the impurity concentration. If the cover is made from an inertia material, such as tungsten