Porous silica materials as low-k dielectrics for electronic and optical interconnects

✍ Scribed by A. Jain; S. Rogojevic; S. Ponoth; N. Agarwal; I. Matthew; W.N. Gill; P. Persans; M. Tomozawa; J.L. Plawsky; E. Simonyi

• Book ID: 117226589
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 894 KB
• Volume: 398-399
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(01)01311-6