Pore Sealing of Porous Ultralow-k Dielectrics by Self-Assembled Monolayers Combined with Atomic Layer Deposition

✍ Scribed by Armini, S.; Prado, J. L.; Swerts, J.; Sun, Y.; Krishtab, M.; Meersschaut, J.; Blauw, M.; Baklanov, M.; Verdonck, P.

• Book ID: 126681236
• Publisher: The Electrochemical Society
• Year: 2012
• Tongue: English
• Weight: 261 KB
• Volume: 1
• Category: Article
• ISSN: 2162-8742
• DOI: 10.1149/2.012202ssl