Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition

✍ Scribed by Jiang, Ying-Bing; Liu, Nanguo; Gerung, Henry; Cecchi, Joseph L.; Brinker, C. Jeffrey

• Book ID: 120310318
• Publisher: American Chemical Society
• Year: 2006
• Tongue: English
• Weight: 408 KB
• Volume: 128
• Category: Article
• ISSN: 0002-7863
• DOI: 10.1021/ja061097d