Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase

✍ Scribed by Armini, Silvia; Prado, Jana Loyo; Krishtab, Mikhail; Swerts, Johan; Verdonck, Patrick; Meersschaut, Johan; Conard, Thierry; Blauw, Michiel; Struyf, Herbert; Baklanov, Mikhail R.

• Book ID: 121725171
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 807 KB
• Volume: 120
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2013.08.007