In the field of optical telecommunication, polymers are an interesting class of materials for the fabrication of passive optical devices. Electron beam (EB) irradiation appears as a promising method to achieve structures presenting a layer with a modified index of refraction, and therefore to genera
β¦ LIBER β¦
Polyimide optical waveguides fabricated with electron beam lithography
β Scribed by Rooks, M. J. ;Roussell, H. V. ;Johnson, L. M.
- Book ID
- 115341062
- Publisher
- The Optical Society
- Year
- 1990
- Tongue
- English
- Weight
- 810 KB
- Volume
- 29
- Category
- Article
- ISSN
- 1559-128X
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