Polarity dependent generation of gate-side and substrate-side oxide border traps in nitrided gate oxides

✍ Scribed by M. Florian Beug; Rüdiger Ferretti; Karl R. Hofmann

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 385 KB
• Volume: 80
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.04.104