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Point-by-point matrix effect calibration for the quantitative analysis of superlattices by secondary ion mass spectrometry

✍ Scribed by Galuska, A. A.; Morrison, G. H.

Book ID
127039286
Publisher
American Chemical Society
Year
1984
Tongue
English
Weight
482 KB
Volume
56
Category
Article
ISSN
0003-2700

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## Abstract For the analysis of hydrogen and helium in solids and thin films by secondary ion mass spectrometry, the use of Cs^+^ primary ions in conjunction with the detection of HCs^+^ and HeCs^+^ molecular ions is proposed. For both species, detection limits of the order of 10^19^ atoms cm^βˆ’3^ a