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Plasma uniformity enhancement in a single-core ferromagnetic inductor coupled plasma source

✍ Scribed by Bliokh, Yu P; Brodsky, Yu L; Chashka, Kh B; Felsteiner, J; Slutsker, Ya Z

Book ID: 121343833
Publisher: Institute of Physics
Year: 2008
Tongue: English
Weight: 500 KB
Volume: 18
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/18/1/015009

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