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Input impedance of a powerful single-core ferromagnetic inductively coupled plasma source

✍ Scribed by Bliokh, Y. P.; Brodsky, Yu. L.; Chashka, Kh. B.; Felsteiner, J.; Slutsker, Ya. Z.

Book ID: 121342287
Publisher: American Institute of Physics
Year: 2010
Tongue: English
Weight: 646 KB
Volume: 107
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3273499

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