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Synthesis of carbon nitride films by low-power inductively coupled plasma-activated transport reactions from a solid carbon source

✍ Scribed by C. Popov; M.F. Plass; A. Bergmaier; W. Kulisch


Book ID
106023590
Publisher
Springer
Year
1999
Tongue
English
Weight
131 KB
Volume
69
Category
Article
ISSN
1432-0630

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