✦ LIBER ✦
Fine-line plasma-enhanced processes on the basis of a set of pilot units with a scalable inductively coupled plasma source for use in microelectronics
✍ Scribed by A. A. Orlikovsky; K. V. Rudenko; S. N. Averkin
- Book ID
- 110164504
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2006
- Tongue
- English
- Weight
- 363 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0018-1439
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