Plasma deposited thin films
β Jansen, Frank; Mort, J
π Library
π
2018
π CRC Press, Taylor & Francis Group
π English
β¦ LIBER β¦
π
Plasma Sources for Thin Film Deposition and Etching
β Scribed by Maurice H. Francombe and John L. Vossen (Eds.)
- Year
- 1994
- Tongue
- English
- Leaves
- 331
- Series
- Physics of Thin Films 18
- Category
- Library
β¬ Acquire This Volume
No coin nor oath required. For personal study only.
β¦ Table of Contents
Content:
Contributors to This Volume
Page ii
Front Matter
Page iii
Copyright page
Page iv
Contributors
Page ix
Preface
Pages xi-xii
M.H. Francombe, J.L. Vossen
Design of High-Density Plasma Sources for Materials Processing
Pages 1-119
MICHAEL A. LIEBERMAN, RICHARD A. GOTTSCHO
Electron Cyclotron Resonance Plasma Sources and Their Use in Plasma-Assisted Chemical Vapor Deposition of Thin Films
Pages 121-233
OLEG A. POPOV
Unbalanced Magnetron Sputtering
Pages 235-288
SUZANNE L. ROHDE
The Formation of Particles in Thin-Film Processing Plasmas
Pages 289-318
CHRISTOPH STEINBRΠΡCHEL
Author Index
Pages 319-321
Subject Index
Pages 323-328
π SIMILAR VOLUMES
Laser Processing of Thin Films and Micro
β Dr. Ian W. Boyd (auth.)
π Library
π
1987
π Springer-Verlag Berlin Heidelberg
π English
<p>This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser proΒ cessing of thin films, particularly, though by no means excluΒ sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing
Film Deposition by Plasma Techniques
β Dr. Mitsuharu Konuma (auth.)
π Library
π
1992
π Springer-Verlag Berlin Heidelberg
π English
<p>Properties of thin films depend strongly upon the deposition technique and conditions chosen. In order to achieve the desired film, optimum deposition conditions have to be found by carrying out experiments in a trial-andΒ error fashion with varying parameters. The data obtained on one growth app
Plasma Deposition, Treatment, and Etchin
β Riccardo d'Agostino, Daniel L. Flamm and Orlando Auciello (Eds.)
π Library
π
1990
π Academic Press
π English
Thin Film Deposition
β Spray Pyrolysis and the Application
π Library
π English
Thin-Film Deposition: Principles and Pra
β Smith D.L.
π Library
π English
R. R. Donnelley & Sons Company, Chicago, USA, 1995. - 641 p.<div class="bb-sep"></div>INTERNATIONAL EDITION<br/>ISBN 0-07-058502-4<div class="bb-sep"></div>Thin film deposition is a broad and burgeoning field, with applications ranging from razor blade coatings to quantum-well lasers. However, much