Plasma Sources for Thin Film Deposition
β Maurice H. Francombe and John L. Vossen (Eds.)
π Library
π
1994
π English
β¦ LIBER β¦
π
Plasma deposited thin films
β Scribed by Jansen, Frank; Mort, J
- Publisher
- CRC Press, Taylor & Francis Group
- Year
- 2018
- Tongue
- English
- Leaves
- 254
- Series
- CRC revivals
- Category
- Library
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No coin nor oath required. For personal study only.
β¦ Table of Contents
Content: 1. Plasma Deposition Processes 2. Plasma-Deposited Films: Kinetics of Formation, Composition, and Microstructure 3. Electronic Properties of Plasma-Deposited Semiconductor Films 4. Carbon Thin Films 5. Silicon Nitride and Other Insulator Films 6. Photovoltaic Structures by Plasma Deposition 7. Xerographic Applications of Plasma-Deposited Amorphous Tetrahedral Materials 8. Hydrogenated Amorphous Silicon Electronic Devices and Their Arrays
β¦ Subjects
Thin film devices;Vapor-plating;Plasma engineering;TECHNOLOGY & ENGINEERING / Mechanical
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