Plasma implantation using high-energy ions and short high voltage pulses
โ Scribed by J.O. Rossi; I.H. Tan; M. Ueda
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 178 KB
- Volume
- 242
- Category
- Article
- ISSN
- 0168-583X
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