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Plasma dynamics in a highly ionized pulsed magnetron discharge

✍ Scribed by Alami, J; Gudmundsson, J T; Bohlmark, J; Birch, J; Helmersson, U


Book ID
127358105
Publisher
Institute of Physics
Year
2005
Tongue
English
Weight
344 KB
Volume
14
Category
Article
ISSN
0963-0252

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