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Plasma-assisted surface modification and radical diagnostics

✍ Scribed by H. Sugai; M. Yamage; Y. Hikosaka; T. Nakano; H. Toyoda

Book ID
107810732
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
842 KB
Volume
200
Category
Article
ISSN
0022-3115

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Optical emission diagnostics in cascade
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Optical Emission Spectroscopy (OES) was used to identify reactive species and their excitation states in low-temperature cascade arc plasmas of N 2 , CF 4 , C 2 F 4 , CH 4 , and CH 3 OH. In a cascade arc plasma, the plasma gas (argon or helium) was excited in the cascade arc generator and injected i