Plasma analyser for plasma-assisted surface process diagnostics up to 100 mbar

✍ Scribed by Sz Kátai; Z Tass; L Bori; Gy Hárs; P Deák

• Book ID: 108390545
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 209 KB
• Volume: 56
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(99)00173-6