✦ LIBER ✦

Plasma Anodization of Silicon Nitride

✍ Scribed by Parkhutik, V. P. ;Makushok, Yu. E. ;Borisov, S. Yu. ;Yakovlev, D. V. ;Martinez-Duart, J. M. ;Albella, J. M. ;Climent, A.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thermal nitridation of anodic silicon di

✍ J.L. Chartier; A. Serrari; R. Le Bihan; M. Ligeon; F. Gaspard; F. Muller 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 300 KB

Anodic plasma nitriding with a molybdenu

✍ M Benda; J Vlc̆ek; J Musil 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 407 KB

Transformation of silicon nitride in oxy

✍ C. Jime´nez; J. Perrie`re; I. Vickridge; J.P. Enard; J.M. Albella 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 430 KB

Electrical properties of plasma-deposite

✍ R.E. Livengood; D.W. Hess 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 384 KB

Anodic bonding of silicon to silicon waf

✍ Martin Nese; Anders Hanneborg 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 977 KB

The plasma anodization to exhaustion of

✍ A. Saad; J.G. Swanson 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 373 KB