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The plasma anodization to exhaustion of thin aluminium films on silicon substrates

✍ Scribed by A. Saad; J.G. Swanson

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 373 KB
Volume: 61
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(79)90481-4

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