✦ LIBER ✦
Oxide film growth on GaAs and silicon substrates by anodization in oxygen plasma and its application to devices and integrated circuit fabrication
✍ Scribed by Takuo Sugano
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 478 KB
- Volume
- 72
- Category
- Article
- ISSN
- 0040-6090
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