✦ LIBER ✦

Plasma abatement of perfluorocompounds in inductively coupled plasma reactors

✍ Scribed by Xu, Xudong “Peter”; Rauf, Shahid; Kushner, Mark J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Abatement of perfluorocarbons with an in

✍ Liao, M. Y.; Wong, K.; McVittie, J. P.; Saraswat, K. C. 📂 Article 📅 1999 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 318 KB

Modelling of inductively coupled plasma

✍ Bose, Deepak; Hash, David; Govindan, T R; Meyyappan, M 📂 Article 📅 2001 🏛 Institute of Physics 🌐 English ⚖ 403 KB

Abatement of Perfluorocompounds by Tande

✍ Lee, How Ming; Chang, Moo Been; Lu, Rung Feng 📂 Article 📅 2005 🏛 American Chemical Society 🌐 English ⚖ 264 KB

Magnetically confined inductively couple

✍ Lai, C. 📂 Article 📅 1995 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 401 KB

Viscous effects on motion and heating of

✍ Chang, C.H.; Bose, D. 📂 Article 📅 1999 🏛 IEEE 🌐 English ⚖ 154 KB

Inductively coupled plasma-mass spectrom

✍ Cantle, J. E.; Fulford, J. E.; Gale, B. C.; Allenby, P. 📂 Article 📅 1987 🏛 Royal Society of Chemistry 🌐 English ⚖ 500 KB