✦ LIBER ✦

Abatement of Perfluorocompounds by Tandem Packed-Bed Plasmas for Semiconductor Manufacturing Processes

✍ Scribed by Lee, How Ming; Chang, Moo Been; Lu, Rung Feng

No coin nor oath required. For personal study only.

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Removal of NF3 from semiconductor-proces

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Abatement of PFCs from Semiconductor Man

✍ Chang, Moo Been; Chang, Jen-Shih 📂 Article 📅 2006 🏛 American Chemical Society 🌐 English ⚖ 92 KB