✦ LIBER ✦

Planar magnetron sputtering cathode with deposition rate distribution controllability

✍ Scribed by Katsuo Abe; Shigeru Kobayashi; Tsuneaki Kamel; Tamotsu Shimizu; Hideki Tateishi; Susumu Aiuchi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Target erosion and deposition rates in p

✍ Gurvitch, M. 📂 Article 📅 1984 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 347 KB

Nitrogen atom energy distributions in a

✍ Wang, Zhehui; Cohen, Samuel A.; Ruzic, David N.; Goeckner, M. J. 📂 Article 📅 2000 🏛 The American Physical Society 🌐 English ⚖ 167 KB

Effect of hydrogen on the deposition rat

✍ Webb, James B. 📂 Article 📅 1982 🏛 American Institute of Physics 🌐 English ⚖ 681 KB

Controlling the deposition rate during t

✍ N.D. Madsen; B.H. Christensen; S. Louring; A.N. Berthelsen; K.P. Almtoft; L.P. N 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 836 KB

High rate deposition of mixed oxides by

✍ Stefan Bruns; Michael Vergöhl; Oliver Werner; Till Wallendorf 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 562 KB

Unlocking the potential of voltage contr

✍ Audronis, Martynas; Matthews, Allan; Juškevičius, Kęstutis; Drazdys, Ramutis 📂 Article 📅 2014 🏛 Elsevier Science 🌐 English ⚖ 759 KB