Pile up of implanted phosphorus during palladium silicide formation and the characteristics of Schottky barrier diodes

✍ Scribed by Kikuchi, Akira

• Book ID: 127340281
• Publisher: American Institute of Physics
• Year: 1983
• Tongue: English
• Weight: 339 KB
• Volume: 54
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.332579