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Physics of ion implantation in plasma–surface interactions

✍ Scribed by Mezey, G.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion-surface interactions in plasma etchi

✍ Coburn, J. W.; Winters, H. F.; Chuang, T. J. 📂 Article 📅 1977 🏛 American Institute of Physics 🌐 English ⚖ 839 KB

Advanced surface treatments by plasma io

✍ G.A. Collins; R. Hutchings; J. Tendys; M. Samandi 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 805 KB

Plasma source ion-implantation technique

✍ Conrad, J. R.; Radtke, J. L.; Dodd, R. A.; Worzala, Frank J.; Tran, Ngoc C. 📂 Article 📅 1987 🏛 American Institute of Physics 🌐 English ⚖ 784 KB

Interaction between the plasma and the w

✍ H.S. Wang; K.Q. Cheng; J.Q. Li; M. Geng; X.C. Zheng; D.Z. Xing; Z.K. Shang 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 403 KB

Plasma source ion implantation project a

✍ Z.K. Shang; K.Q. Chen; X.C. Zeng; J.Q. Li; H.H. Tong; H.S. Wang; M. Geng; D.Z. X 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 511 KB

Surface modification of aluminium by pla

✍ D Manova; P Huber; S Mändl; B Rauschenbach 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 425 KB