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Interaction between the plasma and the workpiece surface in the process of plasma source ion implantation

✍ Scribed by H.S. Wang; K.Q. Cheng; J.Q. Li; M. Geng; X.C. Zheng; D.Z. Xing; Z.K. Shang

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 403 KB
Volume: 66
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(94)90062-0

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