✦ LIBER ✦

Plasma source ion implantation project at Southwestern Institute of Physics

✍ Scribed by Z.K. Shang; K.Q. Chen; X.C. Zeng; J.Q. Li; H.H. Tong; H.S. Wang; M. Geng; D.Z. Xing; J.Q. Wang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma source ion-implantation technique

✍ Conrad, J. R.; Radtke, J. L.; Dodd, R. A.; Worzala, Frank J.; Tran, Ngoc C. 📂 Article 📅 1987 🏛 American Institute of Physics 🌐 English ⚖ 784 KB

Model of collisional sheath evolution in

✍ Wang, Dezhen; Ma, Tengcai; Deng, Xinlu 📂 Article 📅 1993 🏛 American Institute of Physics 🌐 English ⚖ 482 KB

A Monte Carlo simulation model for plasm

✍ Wang, Dezhen; Ma, Tengcai; Gong, Ye 📂 Article 📅 1993 🏛 American Institute of Physics 🌐 English ⚖ 646 KB

Numerical simulation of plasma sheath ex

✍ Emmert, G. A.; Henry, M. A. 📂 Article 📅 1992 🏛 American Institute of Physics 🌐 English ⚖ 835 KB

Vacuum arc ion source with filtered plas

✍ Anders, Simone; Anders, AndreÌ; Brown, Ian G.; MacGill, Robert A.; Dickinson, M 📂 Article 📅 1994 🏛 American Institute of Physics 🌐 English ⚖ 493 KB

Model of plasma immersion ion implantati

✍ Lieberman, M. A. 📂 Article 📅 1989 🏛 American Institute of Physics 🌐 English ⚖ 592 KB