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Physical and electrochemical properties of LiFePO4/C thin films deposited by direct current and radiofrequency magnetron sputtering

✍ Scribed by Gunars Bajars; Gints Kucinskis; Janis Smits; Janis Kleperis

Book ID
108275540
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
745 KB
Volume
188
Category
Article
ISSN
0167-2738

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Structural evolution and electrochemical
Structural evolution and electrochemical performance of LiFePO4/C thin films deposited by ionized magnetron sputtering
✍ K.-F. Chiu; P.Y. Chen πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 840 KB

Thin films of carbon mixed LiFePO 4 were prepared by ionized magnetron sputter deposition (IMSD) and post anneal. The IMSD technique uses a built-in radio frequency coil to generate an inductively coupled plasma (ICP) confined close to the substrate. Therefore, the films were deposited under concurr