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Physical and electrical characterization of Hafnium oxide and Hafnium silicate sputtered films

✍ Scribed by Callegari, A.; Cartier, E.; Gribelyuk, M.; Okorn-Schmidt, H. F.; Zabel, T.

Book ID: 120482725
Publisher: American Institute of Physics
Year: 2001
Tongue: English
Weight: 718 KB
Volume: 90
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1417991

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