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Etching of Zirconium Oxide, Hafnium Oxide, and Hafnium Silicates in Dilute Hydrofluoric Acid Solutions

✍ Scribed by Lowalekar, Viral (author);Raghavan, Srini (author)

Book ID: 126272139
Publisher: Materials Research Society
Year: 2004
Tongue: English
Weight: 733 KB
Volume: 19
Category: Article
ISSN: 0884-2914
DOI: 10.1557/JMR.2004.0149

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