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Physical and chemical processes in gas-discharge plasma during the deposition of nanocarbon films

โœ Scribed by R. R. Ismagilov; A. P. Volkov; P. V. Shvets; A. N. Obraztsov


Book ID
111475621
Publisher
Pleiades Publishing
Year
2009
Tongue
English
Weight
250 KB
Volume
45
Category
Article
ISSN
2070-2051

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