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Effect of gas pressure on the synthesis of carbon nitride films during plasma-enhanced chemical vapor deposition

โœ Scribed by W Yu; G.B Ren; S.F Wang; L Han; X.W Li; L.S Zhang; G.S Fu

Book ID
108388332
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
441 KB
Volume
402
Category
Article
ISSN
0040-6090

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Large-area carbon microtube (CMT) buckypaper was synthesized by gas pressure enhanced chemical vapor deposition in the absence of metal catalysts. Various characterization studies show that the buckypaper is quite flat and has a uniform thickness of around 80 lm. It is composed of highly entangled h