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Photoluminescence of nanocrystalline silicon formed by rare-gas ion implantation

✍ Scribed by A. A. Ezhevskii; M. Yu. Lebedev; S. V. Morozov

Book ID
110140939
Publisher
SP MAIK Nauka/Interperiodica
Year
2005
Tongue
English
Weight
93 KB
Volume
47
Category
Article
ISSN
1063-7834

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## It is well known that nitrogen implantation into aluminium increases the hardness of the aluminium surface owing to the )brmation of crystalline aluminium nitride. In order to enhance the thickness of the aluminium nitride formed during nitrogen implantation in pure aluminium, the samples were