Photoluminescence of Er-doped silicon nanoparticles from sputtered SiOx thin films
β Scribed by Daniel Biggemann; Danilo Mustafa; Leandro R. Tessler
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 151 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0925-3467
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π SIMILAR VOLUMES
A simple reactive evaporation method is proposed to prepare light-emitting SiO x thin films. Pure silicon is evaporated in a controlled molecular oxygen atmosphere. By changing the pressure in the preparation chamber, x can be varied from 0.7 to 1.85. The samples were annealed in the range 350-1100
Er-doped amorphous SiO x thin films with different oxygen contents (0pxp2) were prepared by co-evaporation of Si and SiO 2 . The evolution of the structure of the annealed films was followed by infrared absorption spectrometry. With annealing treatment, a phase separation process occurs, leading to