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Photoluminescence of anodized silicon carbide

✍ Scribed by V. F. Agekyan; Yu. A. Stepanov; A. A. Lebedev; A. A. Lebedev; Yu. V. Rud’


Book ID
110119576
Publisher
Springer
Year
1997
Tongue
English
Weight
48 KB
Volume
31
Category
Article
ISSN
1063-7826

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Anodic oxide films on silicon carbide
✍ S. K. Lilov 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 104 KB

## Abstract Anodic oxide films were grown on SiC using various electrolytes. The obtained oxide films were compared and some of their electrophysical properties were investigated. Anodic oxidation of SiC was shown to be useful for precise removal of layers as well as for identification of the polar