Sub-micron ablation of metallic thin fil
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K. Venkatakrishnan; B. Tan; N.R. Sivakumar
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Article
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2002
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Elsevier Science
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English
β 264 KB
The ability to machine very small features in a material has a wide range of applications in industry. We ablated holes into thin ΓΏlm of 100 nm thickness made from various metals by femtosecond pulsed laser ablation. Using a Ti:Sapphire laser which supplies a laser pulse of 150 fs duration at centra