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Micromachining of a thin film by laser ablation using femtosecond laser with masks

✍ Scribed by Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda

Book ID
108232263
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
298 KB
Volume
42
Category
Article
ISSN
0143-8166

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