Photoinduced Chemical Vapor Deposition of Amorphous Carbon Films from Chloromethane Using a VUV Laser (157 nm)

✍ Scribed by Hukka, Terttu I.; Zhang, Jie

• Book ID: 127249129
• Publisher: American Chemical Society
• Year: 2000
• Tongue: English
• Weight: 312 KB
• Volume: 104
• Category: Article
• ISSN: 0022-3654
• DOI: 10.1021/jp994452d