✦ LIBER ✦
VUV laser (157 nm) chemical vapor deposition of high quality amorphous hydrogenated silicon: gas phase chemistry and modelling
✍ Scribed by H. Karstens; J. Knobloch; A. Winkler; A. Pusel; M. Barth; P. Hess
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 746 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0169-4332
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