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Photoelectron exposure of x-ray resists

✍ Scribed by V.V. Aristov; V.A. Kudryashov; A.A. Svintsov

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 441 KB
Volume: 3
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(85)90073-5

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